QB3 Biomolecular Nanotechnology Center (BNC)Berkeley RIC
The BNC is a fabrication and experimentation facility specializing in BioMEMS, microfluidic devices, electron/ion beam microscopy and nanofabrication. We are a core facility of the California Institute for Quantitative Biosciences and are open to university, national lab, and industry users. Equipment and instrumentation encompasses photolithography, soft lithography, deposition, etching, metrology (including Keyence 3D laser scanning microscope), biological experimentation, an FEI Quanta dual-beam gallium FIB/SEM (EDX, EBSD, STEM detector, OmniProbe, gas injector system, pico-indenter, environmental mode), and a Zeiss ORION NanoFab Helium Ion Microscope (gas injector system for insulator/metal deposition and gas-assisted etching, charge-neutralization system, gallium FIB, NPVE pattern generator). Instrumentation also includes PHI XPS (X-ray Photoemission Spectroscopy) with ion beam for materials analysis, both surface and bulk properties, Nanosurf COREAFM atomic force microscopy, and Parylene Chemical Vapor Deposition system. A full list of equipment and services can be found on the BNC website. The BNC also houses instructional labs and is adjacent to QB3 incubator space.
Keywords
BioMEMS, microfluidic devices, lithography, metrology, SEM, FIB, microfabrication, nanofabrication, electron microscopy, helium ion microscopy, x-ray photoemission spectroscopy