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Space Sciences Lab Scanning Electron Microscopy

Space Sciences Lab has a Tescan Vega XM3 Scanning Electron Microscope (SEM) with integrated EDS microanalysis system (Oxford Instruments). The SEM has a large chamber to scan samples up to 20 cm x 20 cm. The instrument has low vacuum capability, allowing for imaging and microanalysis of non-conductive samples without applying surface coatings.

The SEM uses the current AZtec software suite, with Particle automation package. This allows automated X-ray mapping of large areas, which can be combined to provide gigapixel elemental maps. This software automatically identifies up to 100,000 particles per run according to preset parameters for particles of interest, based on average Z, size and/or shape using the BSE images it collects, and then analyzes the chemical composition of each particle.

SEM services are available to UC researchers/faculty/engineers/postdocs/graduate students and non-UC users.



Keywords

scanning electron microscope, SEM, imaging, non-conductive samples, large area scanning, X-ray analysis, automated particle analysis


Website
Core website
Contact
Alex Bixler
ajbixler@berkeley.edu
Kees Welten
kcwelten@berkeley.edu
Facility Type
  • Imaging

Available for use by
  • UC Berkeley Researchers

  • UC Berkeley Affiliates

  • Non-profits and Other Universities

  • Industry/Commercial Use

Fee Structure
See Campus Recharge
University of California, Berkeley

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