John F. Canny Division of Computer Science/EECS computer science, activity-based computing, livenotes, mechatronic devices, flexonics
Liwei Lin Dept of Mechanical Engineering nanotechnology, MEMS (microelectromechanical systems), NEMS (nanoelectromechanical systems), design and manufacturing of microsensors, microactuators, development of micromachining processes, silicon surface/bulk micromachining, micromolding process